Photoresist Dispensing Pump PDS-105R

High accuracy
Repeatability of ±0.3%(F.S.) is obtained thanks to a stepping motor drive design.

Compact size
260mm in height (330mm for our existing pumps)50mm in width (60mm for our existing pumps)

Saving of Resist
The use of a high-torque stepper motor as the drive source results in a consistent discharge volume, unimpeded by filter clogging or viscosity change. A repeatable accuracy (0.3%) of discharge is maintained.

Contamination-free
Optimized tubephragm design eliminates the possibility of wear particle generation from sliding parts and the possibility of clotting that may occur in dead spaces.