|
Max. discharge capacity |
5.0 mL/shot |
|
Discharge speed |
0.1 to 4.0 mL/sec |
|
Suction speed |
0.1 to 3.0 mL/sec |
|
Max. discharge pressure |
0.15 MPa |
|
Repeatability |
±0.3 % or below (F.S.) |
|
Main materials |
PFA, PTFE, PCTFE, Kalrezr 3 |
|
Max. allowable viscosity |
200 mPa·s |
Photoresist Dispensing Pump PDS-105R
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High accuracy
Repeatability of ±0.3%(F.S.) is obtained thanks to a stepping motor drive design.
Compact size
260mm in height (330mm for our existing pumps)50mm in width (60mm for our existing pumps)
Saving of Resist
The use of a high-torque stepper motor as the drive source results in a consistent discharge volume, unimpeded by filter clogging or viscosity change. A repeatable accuracy (0.3%) of discharge is maintained.
Contamination-free
Optimized tubephragm design eliminates the possibility of wear particle generation from sliding parts and the possibility of clotting that may occur in dead spaces.
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