Pneumatic Drive Pump FS-N Series

High stroke speed
The pump’s fast stroke speed（Max.200spm：FS-80N） allows compactness, light weight and low cost while enabling high flow & pressure capabilities.

Contamination-free
All wet ends are made of fluororesin to give contamination-free construction. Our unique shaft seal also dramatically reduces particle generation (Patent-protected: FS-80N).

High flow & pressure capabilities
The maximum supply air pressure of 0.7MPa meets not only the demand for high flow & pressure capabilities in chemical supply processes but also requirements in cleaning/CMP processes.

Sensor drive
Built-in proximity sensors open/close the solenoid valve. Flow rate control can be assured and facilitated when they are used with our controllers.